Study on the mechanism of rapid solid-phase recrystallization of hydrogenated amorphous silicon film by rapid thermal processing

Xiaoyong Gao, Hongliang Feng, Qinggeng Lin, Liwei Zhang, Xuwei Liu, Jiantao Zhao, Yufeng Liu, Yongsheng Chen, Jinhua Gu, Shie Yang, Weiqiang Li and Jingxiao Lu

Thin Solid Films 518 ( 15 ): 4473 - 4476 , 2010