The photoluminescence of SiCN thin films prepared by C⁺ implantation into α-SiN_x:H

Yuzhen Liu, Xia Zhang, Chao Chen, Guobin Zhang, Pengshou Xu, Dapeng Chen and Lijun Dong

Thin Solid Films 518 ( 15 ): 4363 - 4366 , 2010