Correction of higher order geometrical aberration by triple 3-fold astigmatism field

H Sawada, T Sasaki, F Hosokawa, S Yuasa, M Terao, M Kawazoe, T Nakamichi, T Kaneyama, Y Kondo, K Kimoto and K. Suenaga

Journal of Electron Microscopy 58 ( 6 ): 341 - 347 , 2009