Articles by Fu-Zhen Xuan (1)

Influence of residual stress on diffusion-induced bending in bilayered microcantilever sensors

Fu-Zhen Xuan, Shan-Shan Shao, Zhengdong Wang and Shan-Tung Tu

Thin Solid Films 518 ( 15 ): 4345 - 4350 , 2010

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