Prospects and Applications of Thin-Film Magnetostrictive Membranes for Mems Transducers

V.V. Amelichev, V.V. Platonov, S.S. Generalov, S.V. Nikiforov, D.A. Zhukov, D.V. Vasilyev, Yu.V. Kazakov and Ya.V. Goldberg

Journal of Engineering and Applied Sciences 12 ( 7 ): 1935 - 1937 , 2017