Celebrating the 100th anniversary of the Stoney equation for film stress: Developments from polycrystalline steel strips to single crystal silicon wafers

G.C.A.M. Janssen, M.M. Abdalla, F. van Keulen, B.R. Pujada and B. van Venrooy

Thin Solid Films 517 ( 6 ): 1858 - 1867 , 2009